Working Group 7.22
EUV Radiometry

The working group operates the EUV radiometry beamline in the PTB laboratory at BESSY II covering the spectral range from 0.7 nm to 35 nm (35 eV to 1850 eV). This includes the extreme UV spectral range (EUV) around 13.5 nm. The EUV reflectometer (video 16 MB) is installed at this beamline and an electrical substitution radiometer is used as primary standard for detector calibration. The tasks in detail are:

• EUV reflectometry
• providing metrology for the development of EUV Lithography in close cooperation with industry
• general measurements of reflectance and transmittance in the spectral range 0.7 nm to 35 nm
• general measurements of detector response in the spectral range 0.7 nm to 35 nm
• scatterometry

Additionally:

• calibration of energy dispersive X-ray detectors using undispersed synchrotron radiation of BESSY II as a source standard
• investigation of material properties like e. g. absorptance
• support of industry for the development of laboratory based EUV metrology